Art

J-GLOBAL ID：201702241987111728   Reference number：17A0229889

Transparent Conductive and Wide Band Gap Characteristics of Quaternary Mg and Al Co-Doped ZnO Thin Films Prepared by Radio Frequency Sputtering Method

高周波スパッタリング法により作製した4元系MgおよびAlをコドーピングしたZnO薄膜の透明導電性および広帯域ギャップ特性

Author (7)： JEON Ki Seok (Chonnam National Univ., Gwangju, KOR) ,  SURYAWANSHI M. P. (Chonnam National Univ., Gwangju, KOR) ,  KIM In Young (Gwangju Inst. of Sci. and Technol., Gwangju, KOR) ,  JANG Jun Sung (Chonnam National Univ., Gwangju, KOR) ,  YUN Jae Ho (Korea Inst. of Energy Res., Daejeon, KOR) ,  MOON Jong Ha (Chonnam National Univ., Gwangju, KOR) ,  KIM Jin Hyeok (Chonnam National Univ., Gwangju, KOR)
Material： Science of Advanced Materials  (Sci Adv Mater)
Volume： 8  Issue： 3  Page： 669-674  Publication year： Mar. 2016 
JST Material Number： W2374A  ISSN： 1947-2935  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *RF sputtering ,  *multi-component system ,  *magnesium ,  *aluminum ,  *doping ,  *thin film ,  *compound semiconductor ,  *oxide ,  band gap ,  optical property ,  structural property ,  electrical property ,  characteristic ,  electric power ,  X-ray diffractometry ,  scanning electron microscope ,  Hall effect ,  crystal structure ,  spectroscopy ,  transmissivity ,  carrier density ,  electrical resistivity
Semi thesaurus term： radio frequency sputtering ,  quaternary system ,  Mg ,  aluminium ,  *co-doping ,  *ZnO thin film ,  *transparent conducting oxide ,  energy band gap ,  optical property ,  structural property ,  electrical property ,  morphological property ,  field emission scanning electron microscope ,  ultraviolet and visible spectroscopy ,  light transmittance ,  carrier concentration

JST classification (5)： Oxide thin films  (BK14050P) ,  Techniques and equipment of thin film deposition  (BK14020I) ,  Crystal structure of inorganic compounds in general  (BK07001T) ,  Electric conduction in other inorganic compounds  (BM03044O) ,  Optical properties of condensed matter in general  (BM08010A)

Terms in the title (10)： 高周波スパッタリング ,  作製 ,  4元系 ,  Mg ,  Al ,  コドーピング ,  ZnO薄膜 ,  導電性 ,  広帯域 ,  ギャップ