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J-GLOBAL ID:201702242031306718   Reference number:17A0505952

Internal Physical Analysis of Microwave Discharge Neutralizer with Density Distribution of Neutral Particles

中性粒子密度分布を考慮したマイクロ波放電型中和器内部の物理現象解析
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Volume: 57th  Page: ROMBUNNO.2A16  Publication year: 2017 
JST Material Number: Z0894B  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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