Art

J-GLOBAL ID：201702247701449845   Reference number：17A0173694

Online detection of profile deviation for nano precision 2-D stage mirror

ナノ精度二次元作業台測定鏡の表面形状誤差のオンライン検出【JST・京大機械翻訳】

Author (7)： Liu Zhaowu (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences) ,  Li Wenhao (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences) ,  Wang Jingkai (Beihang University) ,  Jiang Shan (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences) ,  Song Ying (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences) ,  Pan Mingzhong (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences) ,  Bayanheshig (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences)
Material： Guangxue Jingmi Gongcheng  (Optics and Precision Engineering)
Volume： 24  Issue： 9  Page： 2134-2141  Publication year： 2016 
JST Material Number： C2090A  ISSN： 1004-924X  Document type： Article
Article type： 原著論文  Country of issue： China (CHN)  Language： CHINESE (ZH)

Abstract/Point： For the profile deviation of a...

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Thesaurus term： laser interferometer ,  *two dimension ,  span ,  interferometer ,  zero point ,  measurement accuracy ,  *working stand ,  integral ,  measurement error
Semi thesaurus term： 鏡面 ,  感知機構 ,  *表面形状 ,  位置決め精度 ,  *オンライン ,  *形状誤差 , 【Automatic Indexing@JST】

Author keywords (5)： laser interferometer ,  nano-2D stage ,  stage mirror ,  profile deviation ,  online detection

JST classification (2)： Measuring methods and instruments of length,area,cross section,volume,angle  (AD05020O) ,  Interferometry and interferometers  (BD07070G)

Terms in the title (3)： 作業台 ,  形状誤差 ,  オンライン