Art

J-GLOBAL ID：201702278398833801   Reference number：17A0264494

Effects of Multi-arc Ion Plating Process Parameters on Binding Force of TiN Film

窒化チタン膜の結合力に及ぼすアークイオンプレーティングプロセスパラメータの影響について研究した。【JST・京大機械翻訳】

Author (9)： Song Yize (Guangxi Key Laboratory of Information Materials, School of Materials Science and Technology, Guilin University of Electronic Technology) ,  Gao Yuan (School of Materials Science and Technology, Guilin University of Electronic Technology) ,  Dong Zhongxin (Guilin Guanglu Measuring Instrument Co., Ltd.) ,  Zhang Yan (School of Materials Science and Technology, Guilin University of Electronic Technology) ,  Peng Kai (School of Materials Science and Technology, Guilin University of Electronic Technology) ,  Wang Chenglei (School of Materials Science and Technology, Guilin University of Electronic Technology) ,  Wei Wenzhu (School of Materials Science and Technology, Guilin University of Electronic Technology) ,  Lu Xiaohui (School of Materials Science and Technology, Guilin University of Electronic Technology) ,  Zhang Guangyao (School of Materials Science and Technology, Guilin University of Electronic Technology)
Material： Rejiagong Gongyi  (Hot Working Technology)
Volume： 45  Issue： 14  Page： 133-135,138  Publication year： 2016 
JST Material Number： C2487A  ISSN： 1001-3814  Document type： Article
Article type： 原著論文  Country of issue： China (CHN)  Language： CHINESE (ZH)

Abstract/Point： TiN coating was deposited on 4...

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Thesaurus term： *bias ,  adhesive strength ,  adhesion test ,  electric current ,  thin film ,  Stainless Steel ,  optimal parameter ,  deposition temperature ,  arc current ,  *titanium nitride ,  *vacuum arc deposition
Semi thesaurus term： バイアス電圧 ,  *アークイオンプレーティング , 【Automatic Indexing@JST】

Author keywords (3)： multi-arc ion plating ,  TiN ,  binding force

JST classification (1)： Vapor plating  (WC08022K)

Terms in the title (4)： 窒化 ,  チタン膜 ,  結合力 ,  研究