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J-GLOBAL ID：201702279437271673   Reference number：17A0055477

Characterization and gas sensor testing of single and mixed metal oxides based on NiO and TiO₂ thin films

NiOとTiO_2薄膜に基づいた単一および混合金属酸化物のキャラクタリゼーションとガスセンサ試験【Powered by NICT】

Author (5)： Hotovy I. (Institute of Electronics and Photonics, Slovak University of Technology, Ilkovicova 3, 812 19 Bratislava, Slovakia) ,  Predanocy M. (Institute of Electronics and Photonics, Slovak University of Technology, Ilkovicova 3, 812 19 Bratislava, Slovakia) ,  Mikolasek M. (Institute of Electronics and Photonics, Slovak University of Technology, Ilkovicova 3, 812 19 Bratislava, Slovakia) ,  Benko P. (Institute of Electronics and Photonics, Slovak University of Technology, Ilkovicova 3, 812 19 Bratislava, Slovakia) ,  Rehacek V. (Institute of Electronics and Photonics, Slovak University of Technology, Ilkovicova 3, 812 19 Bratislava, Slovakia)
Material： IEEE Conference Proceedings  (IEEE Conf Proc)
Volume： 2016  Issue： ASDAM  Page： 161-164  Publication year： 2016 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： We present results on single a...

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Thesaurus term： *sensor ,  Hydrogen ,  X-Ray Diffraction ,  *metal oxide ,  alumina ,  polycrystal ,  *characterization ,  *oxide ,  amorphous state ,  *gas sensor ,  *thin film ,  reactive magnetron sputtering ,  Si wafer
Semi thesaurus term： 動作温度 , 【Automatic Indexing@JST】

JST classification (1)： Oxide thin films  (BK14050P)

Terms in the title (6)： NiO ,  薄膜 ,  混合金属酸化物 ,  キャラクタリゼーション ,  ガスセンサ ,  試験