Art
J-GLOBAL ID：201702279932246101   Reference number：17A0220687

Development of High-Precision Vertical-Axis Table

高精度 垂直軸テーブルの開発
Author (1)：
SATO TOSHINORI

About SATO TOSHINORI

(日本精工)

About 日本精工


Material：
NSK Technical Journal  (NSK Tech J)

About NSK Technical Journal


Issue： 689  Page： 66-71  Publication year： Jan. 20, 2017 
JST Material Number： S0469A  ISSN： 0911-4920  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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accuracy

About accuracy

, 
*semiconductor device

About semiconductor device

, 
equipment

About equipment

, 
positioning

About positioning

, 
position control

About position control

, 
positioning device

About positioning device

, 
air bearing

About air bearing

, 
straightness

About straightness


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*垂直軸テーブル

About 垂直軸テーブル

, 
*semiconductor element

About semiconductor element

, 
manufacturing device

About manufacturing device

, 
三次元化

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, 
位置決めテーブル

About 位置決めテーブル

, 
aerostatic bearing

About aerostatic bearing


JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

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開発

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