Art
J-GLOBAL ID：201702282165392811   Reference number：17A0190502

Investigation of Photoresist Removal Process using Microwave Plasma in Water Vapor by Means of Optical Emission Spectroscopy

水蒸気雰囲下におけるマイクロ波励起プラズマによるレジスト膜除去プロセスの分光学的手法を用いた検討
Author (11)：
SUZUKI Hiroaki

About SUZUKI Hiroaki

(Kanazawa Univ., Kanazawa, JPN)

About Kanazawa Univ., Kanazawa, JPN

, 
KITANO Takuya

About KITANO Takuya

(Kanazawa Univ., Kanazawa, JPN)

About Kanazawa Univ., Kanazawa, JPN

, 
SHIOTA Arufua

About SHIOTA Arufua

(Kanazawa Univ., Kanazawa, JPN)

About Kanazawa Univ., Kanazawa, JPN

, 
ISHIJIMA Tatsuo

About ISHIJIMA Tatsuo

(Kanazawa Univ., Kanazawa, JPN)

About Kanazawa Univ., Kanazawa, JPN

, 
TANAKA Yasunori

About TANAKA Yasunori

(Kanazawa Univ., Kanazawa, JPN)

About Kanazawa Univ., Kanazawa, JPN

, 
UESUGI Yoshihiko

About UESUGI Yoshihiko

(Kanazawa Univ., Kanazawa, JPN)

About Kanazawa Univ., Kanazawa, JPN

, 
AIZAWA Takeshi

About AIZAWA Takeshi

(Yonekura MFG Co., Ltd., Yokohama, JPN)

About Yonekura MFG Co., Ltd., Yokohama, JPN

, 
KHUMPUANG Sommawan

About KHUMPUANG Sommawan

(Minimal Fab Dev. Assoc., Tsukuba, JPN)

About Minimal Fab Dev. Assoc., Tsukuba, JPN

, 
KHUMPUANG Sommawan

About KHUMPUANG Sommawan

(National Inst. of Advanced Sci. and Technol., Tsukuba, JPN)

About National Inst. of Advanced Sci. and Technol., Tsukuba, JPN

, 
HARA Shiro

About HARA Shiro

(Minimal Fab Dev. Assoc., Tsukuba, JPN)

About Minimal Fab Dev. Assoc., Tsukuba, JPN

, 
HARA Shiro

About HARA Shiro

(National Inst. of Advanced Sci. and Technol., Tsukuba, JPN)

About National Inst. of Advanced Sci. and Technol., Tsukuba, JPN


Material：
プラズマプロセシング研究会プロシーディングス(CD-ROM)  (プラズマプロセシング研究会(CD-ROM))

About プラズマプロセシング研究会プロシーディングス(CD-ROM)


Volume： 34th  Page： ROMBUNNO.17pA5  Publication year： Jan. 16, 2017 
JST Material Number： L4449B  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*plasma treatment

About plasma treatment

, 
*microwave discharge

About microwave discharge

, 
water vapor

About water vapor

, 
removal

About removal

, 
*plasma spectroscopy

About plasma spectroscopy

, 
emission spectroscopy

About emission spectroscopy

, 
carbon monoxide

About carbon monoxide

, 
*photoresist

About photoresist

, 
plasma

About plasma


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*レジスト膜除去

About レジスト膜除去

, 
water plasma

About water plasma


JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Plasma diagnostics 
(BJ02090L)

About Plasma diagnostics

Terms in the title (8)：
Terms in the title
Keywords automatically extracted from the title.
水蒸気

About 水蒸気

, 
マイクロ波

About マイクロ波

, 
励起

About 励起

, 
プラズマ

About プラズマ

, 
レジスト膜

About レジスト膜

, 
除去プロセス

About 除去プロセス

, 
分光学

About 分光学

, 
手法

About 手法


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