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J-GLOBAL ID：201702298711700703   Reference number：17A0214337

A fundamental AC TDDB study of BEOL ELK in advanced technology

先端技術のBEOLヘラジカの基本AC TDDB研究【Powered by NICT】

Author (4)： Chang M. N. (Taiwan Semiconductor Manufacturing Company, Ltd., 121, Park Ave. 3, Science-Based Industrial Park, Hsinchu, Taiwan 300-77, R.O.C.) ,  Lee Y.-H. (Taiwan Semiconductor Manufacturing Company, Ltd., 121, Park Ave. 3, Science-Based Industrial Park, Hsinchu, Taiwan 300-77, R.O.C.) ,  Lee S. Y. (Taiwan Semiconductor Manufacturing Company, Ltd., 121, Park Ave. 3, Science-Based Industrial Park, Hsinchu, Taiwan 300-77, R.O.C.) ,  Huang Y. S. (Taiwan Semiconductor Manufacturing Company, Ltd., 121, Park Ave. 3, Science-Based Industrial Park, Hsinchu, Taiwan 300-77, R.O.C.)
Material： IEEE Conference Proceedings  (IEEE Conf Proc)
Volume： 2016  Issue： IEDM  Page： 31.7.1-31.7.4  Publication year： 2016 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： In this study, we thoroughly i...

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Thesaurus term： growth rate (ratio) ,  electric charge ,  ion diffusion ,  *Copper ,  time constant ,  criticality ,  dielectrics ,  ion concentration ,  Weibull distribution ,  power law ,  charge trapping ,  *Time-Dependent Dielectric Breakdown
Semi thesaurus term： デューティサイクル ,  電圧ストレス ,  *TDDB ,  *BEOL , 【Automatic Indexing@JST】

JST classification (2)： Wind energy  (LB03060X) ,  Local circulation,air flow  (DC05090N)

Terms in the title (5)： BEOL ,  ヘラジカ ,  Ac ,  TDDB ,  研究