Rchr

J-GLOBAL ID：201501004051532874 Update date: Sep. 16, 2022

SUZUKI Tatsutoshi

SUZUKI Tatsutoshi

Affiliation and department：
Papers (1)：

Tomoko Yamaguchi, Hajime Sano, Tatsutoshi Suzuki, Hiroyuki Makino, Kentarou Oohashi, Makito Okamoto. Middle ear metastasis of thymoma. AURIS NASUS LARYNX. 2012. 39. 1. 90-93

MISC (13)：

Tomoyuki Kawaguchi, Yuto Takagi, Ryota Sakamoto, Ken'ich Yano, Tatsutoshi Suzuki. Proposal of Tool Path Generation for Recycle Pad in Chemical Mechanical Polishing Based on Piecewise Linear Interpolation Method. 2014 IEEE/SICE INTERNATIONAL SYMPOSIUM ON SYSTEM INTEGRATION (SII). 2014. 441-446
SUZUKI DAISUKE, SUZUKI TATSUTOSHI, SUZUKI EISUKE. 研磨パッドの長寿命化を指向した再生用補助板と周辺技術開発(第1報)-再生原理とその特長-. 精密工学会大会学術講演会講演論文集. 2013. 2013. ROMBUNNO.J18
Suzuki Daisuke, Suzuki Tatsutoshi, Suzuki Eisuke. Development of Auxiliary Plate: SAISEI ECO CAP® and Its Related Technique for Polishing Pad Reusable System:1st Report: Reusable Method and Its Characteristics. Proceedings of JSPE Semestrial Meeting. 2013. 2013. 0. 623-624
鈴木辰俊. 低CO2の実現に向けたパッドリサイクル技術. Planarization CMP & its applications. 2013. 16. 33-35
INAGAKI JUN'ICHI, HAYASHI DAIKI, SUZUKI TATSUTOSHI, SUZUKI NORIKAZU. 半導体積層構造(TSV)基板の平坦化技術の開発-新規研磨パッドとパッド再生技術の開発-. 三重県工業研究所研究報告. 2012. 36. 112-114

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Patents (33)：

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