Tomoki Harada, Daisuke Ohori, Kazuhiko Endo, Seiji Samukawa, Tetsuo Ikari, Atsuhiko Fukuyama. Lifetime of photoexcited carriers in space-controlled Si nanopillar/SiGe composite films investigated by a laser heterodyne photothermal displacement method. Journal of Applied Physics. 2023. 133. 12
Beibei Ge, Daisuke Ohori, Yi-Ho Chen, Takuya Ozaki, Kazuhiko Endo, Yiming Li, Jenn-Hwan Tarng, Seiji Samukawa. Room-temperature and high-quality HfO2/SiO2 gate stacked film grown by neutral beam enhanced atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 2022. 40. 2
Takahiro Ishihara, Daisuke Ohori, Xuelun Wang, Kazuhiko Endo, Nobuhiro Natori, Daisuke Sato, Yiming Li, Seiji Samukawa. Hydrogen Iodide (HI) Neutral Beam Etching for InGaN/GaN Micro-LED. Proceedings of the IEEE Conference on Nanotechnology. 2022. 2022-July. 48-51
安良田, 裕基, 原田, 知季, 森田, 浩右, 大堀, 大介, 寒川, 誠二, 碇, 哲雄, 福山, 敦彦. ナノピラー(NP)間隔を変化させたSi-NP/SiGe複合膜の熱および光学的特性評価. 宮崎大学工学部紀要 = Miyazaki University Faculty of Engineering, University of Miyazaki. 2021. 50. 59-63
Daisuke Ohori, Takahiro Sawada, Kenta Sugawara, Masaya Okada, Ken Nakata, Kazutaka Inoue, Daisuke Sato, Seiji Samukawa. Selective atomic layer reaction between GaN and SiN in HBr neutral beam etching. Journal of Vacuum Science & Technology A. 2021. 39. 4. 042601-042601
Atomic Layer Etching, Deposition and Modification Processes for Novel Nano-materials and Nano-devices
(3rd Asia-Pacific Conference on Plasma Physics 2019)
Atomic Layer Defect-free Etching for Future sub-10nm Nano-devices
(2019 International Electron, Devices and Materials Symposium 2019)
Creating Green Nanostructures and Nanomaterials for Advanced Energy Nanodevices
(IEEE Distinguished Lecturer Program (Universiti Malaysia Perlis 2019)
Creating Green Nanostructures and Nanomaterials for Advanced Energy Nanodevices
(IEEE International Microwave, Electron Devices & Solid-State Circuit Symposium (IMESS) 2019 2019)
2019/01 - The Institute of Electrical and Electronics Engineers ディ スティングイッシュト・レクチャラー ディ スティングイッシュト・レクチャラー
2019 - IEEE IEEE Distinguished Lecturers 2019 Creating Green Nanostructures and Nanomaterials for Advanced Energy Nanodevices
2018/12 - IEEE International Electron Device Meeting IEEE Fellow
2016/08/25 - IEEE 16th International Conference on Nanotechnology Best Paper Award
2015/11/20 - International Electron Devices and Materials Symposium 2015 International Electron Devices and Materials Symposium 2015 Best Paper Award Miniband Dependence on the Density of Ge/Si Quantum Dots for Solar Cell Application
2012/06/30 - IEEE Institute of Electrical and Electronics Engineers (IEEE) Senior Member
2010/10/19 - American Vacuum Society American Vacuum Society Plasma Prize For ground-breaking contributions to the development of innovative plasma sources
2010/09/14 - 社団法人応用物理学会 応用物理学会論文賞(JJAP論文賞) Two-Dimensional Si-Nanodisk Array Fabricated Using Bio-Nano-Process and Neutral Beam Etching for Realistic Quantum Effect Devices
2010/03/17 - 社団法人応用物理学会 プラズマエレクトロニクス賞 On-wafer monitoring of charge accumulation and sidewall conductivity in high-aspect-ratio contact holes during SiO2 etching process
2009/11/11 - American Vacuum Society American Vacuum Society Fellow Development of innovative plasma sources and damages free pulsed plasma processing techniques