Takeshi Yoshimura, Taiki Haga, Norifumi Fujimura, Kensuke Kanda, Isaku Kanno. Piezoelectric MEMS-based physical reservoir computing system without time-delayed feedback. Japanese Journal of Applied Physics. 2023. 62. SM. SM1013-SM1013
Goki Kimura, Sang-Hyo Kweon, Kiyotaka Tanaka, Yukio Sato, Isaku Kanno. Internal stress effects on the piezoelectric properties of Pb(Zr,Ti)O3 superlattice thin films grown on Si substrates. Applied Physics Letters. 2023. 122. 12. 122902-1-122902-6
Isaku Kanno, Jun Ouyang, Jun Akedo, Takeshi Yoshimura, Barbara Malic, Paul Muralt. Piezoelectric thin films for MEMS. APPLIED PHYSICS LETTERS. 2023. 122. 9
Goon Tan, Sang-Hyo Kweon, Isaku Kanno. Piezoelectric properties of epitaxial Pb(Zr,Ti)O3 thin films grown on Si substrates by the sol-gel method. THIN SOLID FILMS. 2023. 764
Kiyotaka Tanaka, Rei Ogawa, Sang Hyo Kweon, Goon Tan, Isaku Kanno. Annealing effects on epitaxial (K,Na)NbO3 thin films grown on Si substrates. JAPANESE JOURNAL OF APPLIED PHYSICS. 2022. 61. SN
2003/10 - Microsystem Technologies Microsystem Technologies: Best Poster Award Low-Voltage actuation of RF-MEMS switch using Piezoelectric PZT thin films