BORISENKO I YU について
Inst. Problems of Microelectronic Technology and High-Purity Materials, Russian Academy of Sciences, Chernogolovka について
ZAKOSARENKO V M について
Inst. Problems of Microelectronic Technology and High-Purity Materials, Russian Academy of Sciences, Chernogolovka について
IL’ICHEV E V について
Inst. Problems of Microelectronic Technology and High-Purity Materials, Russian Academy of Sciences, Chernogolovka について
ORLOV A M について
Inst. Problems of Microelectronic Technology and High-Purity Materials, Russian Academy of Sciences, Chernogolovka について
Instruments and Experimental Techniques について