研究者

J-GLOBAL ID：200901092349858720 更新日: 2024年03月07日

石川靖彦

イシカワヤスヒコ | Ishikawa Yasuhiko

所属機関・部署：
職名：教授
ホームページURL (1件)： http://www.int.ee.tut.ac.jp/photon/

研究分野 (4件)：光工学、光量子科学 , 電子デバイス、電子機器 , 電気電子材料工学 , 結晶工学

研究キーワード (5件)：エピタキシャル成長 , 光電子集積 , 光デバイス , シリコン・ゲルマニウム , シリコンフォトニクス

競争的資金等の研究課題 (33件)：

2022 - 2025 高品質グラフェンとシリコンフォトニクスのヘテロ集積によるTHz-光融合
2021 - 2024 Si上に選択エピタキシャル成長したGe層に対するウエハ面内バンドエンジニアリング
2018 - 2021 表面プラズモン論理演算回路構成技術の創出
2015 - 2020 光信号の低コスト受信モニタリングのための小型光位相同期回路の研究開発
2016 - 2019 バルクシリコンを用いたシリコン・ゲルマニウムフォトニクスプラットフォームの形成

全件表示

論文 (206件)：

Yasuhiko Ishikawa. Trench-filling heteroepitaxy of [100]-oriented germanium arrays on (001) silicon substrate. Japanese Journal of Applied Physics. 2024
Yasuhiko Ishikawa. Anti-relaxation of tensile lattice strain in Si-embedded Ge strip structure for photonic device applications. Japanese Journal of Applied Physics. 2024
Mohd Faiz Bin Amin, Jose A. Piedra-Lorenzana, Keisuke Yamane, Takeshi Hizawa, Tetsuya Nakai, Yasuhiko Ishikawa. High-quality Ge epitaxial film based on dislocation trapping mechanism in patterned Si substrate. Japanese Journal of Applied Physics. 2023
Junichi Fujikata, Masataka Noguchi, Riku Katamawari, Kyosuke Inaba, Hideki Ono, Daisuke Shimura, Yosuke Onawa, Hiroki Yaegashi, Yasuhiko Ishikawa. High-performance Ge/Si electro-absorption optical modulator up to 85°C and its highly efficient photodetector operation. Optics Express. 2023. 31. 6. 10732-10732
Kota Kato, Kazuki Motomura, Jose A. Piedra-Lorenzana, Mohd Faiz Bin Amin, Takeshi Hizawa, Tetsuya Nakai, Yasuhiko Ishikawa. Trench-Filling Epitaxy of Germanium on (001) Silicon Enhanced Using [100]-Oriented Patterns. Journal of Electronic Materials. 2023. 52. 8. 5066-5074

MISC (253件)：

金子尚平, PIEDRA-LORENZANA Jose A., 藤方潤一, 石川靖彦. Ge細線構造を用いた導波路受光器の受光スペクトルと温度特性評価. 応用物理学会春季学術講演会講演予稿集(CD-ROM). 2023. 70th
佐藤真希斗, 西依輝, PIEDRA-LORENZANA Jose A., 飛沢健, 石川靖彦. バルクSi上への光集積に向けたSiGe/Ge層のエピタキシャル成長. 応用物理学会春季学術講演会講演予稿集(CD-ROM). 2023. 70th
福島孝晃, LORENZANA Jose A. Piedra, 飛沢健, 石川靖彦. シリコンフォトニクス用AlN膜の低温反応性スパッタリング. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2022. 83rd
AMIN Mohd Faiz Bin, PIEDRA-LORENZANA Jose A., HIZAWA Takeshi, NAKAI Tetsuya, ISHIKAWA Yasuhiko. Siパターン基板上へのGeエピタキシャル層のCVD成長. 応用物理学会春季学術講演会講演予稿集(CD-ROM). 2022. 69th
葛谷樹矢, 飛沢健, 石川靖彦. Si-on-quartzウエハ上ひずみGe層の近赤外吸収特性. 応用物理学会春季学術講演会講演予稿集(CD-ROM). 2022. 69th

特許 (44件)：

書籍 (5件)：

次世代高速通信に対応する光回路実装、デバイスの開発
技術情報協会 2022
Photonics and Electronics with Germanium
Wiley-VCH, Weinheim 2015
Silicon Photonics II (Topics in Applied Physics)
Springer Verlag 2010
Optical Interconnects - The Silicon Approach
Springer Verlag 2006
Silicon Nanoelectronics,
Tayler & Francis 2005

講演・口頭発表等 (392件)：

光導波路応用に向けたバルクSi上SiGe層のCVD成長
(2023)
Siフォトニクス応用に向けたTEOS-SiOx膜のPECVDによる堆積
(2023)
Si上Ge細線構造を用いた横型p-i-n受光器におけるLおよびU帯での受光感度向上
(Photonic Device Workshop 2023 (PDW2023) 2023)
引張格子ひずみを増強したGe層を用いたSi上フリースペースpin受光器の暗電流評価
(2023)
UHV-CVDによるV溝パターンSi基板上へのGeエピタキシャル成長
(第10回応用物理学会名古屋大学スチューデントチャプター東海地区学術講演会 2023)

学歴 (1件)：

- 1998 北海道大学

学位 (1件)：

博士(工学) (北海道大学)

委員歴 (38件)：

2023/04 - 現在半導体の結晶成長と加工および評価に関する応物産学連携委員会委員
2019/06 - 現在電子情報通信学会光集積及びシリコンフォトニクス特別研究専門委員会委員
2012 - 現在電子材料シンポジウムプログラム委員
2023/04 - 2025/03 応用物理学会東海支部幹事
2021/04 - 2023/03 応用物理学会東海支部支部長補佐

2017/10 - 2023/03 日本学術振興会産学協力研究委員会結晶加工と評価技術第145委員会学界委員

- 2022/10 242nd ECS Meeting, Symposium on SiGe, Ge and related compounds, Optoelectronics Committee, Program Committee Member

- 2020/10 238th ECS Meeting, Symposium on SiGe, Ge and related compounds, Optoelectronics Committee, Program Committee Member

2017/06 - 2019/05 電子情報通信学会シリコンフォトニクス特別研究専門委員会委員

- 2018/10 Americas International Meeting on Electrochemistry and Solid Science (AiMES) 2018, 8th International SiGe, Ge, and Related Compounds: Materials, Processing, and Devices Symposium, Optoelectronics Committee, Program Committee Member

2015/06 - 2017/05 電子情報通信学会シリコンフォトニクス時限研究専門委員会委員

- 2016/10 230th ECS Meeting, Symposium on SiGe, Ge and related compounds, Optoelectronics Committee, Program Committee Member

- 2016/04 Materials Research Society (MRS) 2016 Spring Meeting, Symposium EP7 “Material and Device Frontiers for Integrated Photonics”, Symposium Organizer (Lead Organizer)

- 2015/09 The 47th International Conference on Solid State Devices and Materials (SSDM2015), Steering Committee Member

- 2015/09 The 47th International Conference on Solid State Devices and Materials (SSDM2015), Program Committee Member (Area 7: Photonic Devices and Related Technologies, Chair)

- 2014/10 226th ECS Meeting, Symposium on SiGe, Ge and related compounds, Optoelectronics Committee, Program Committee Member

- 2014/10 The Forum on the Science and Technology of Silicon Materials 2014 (シリコン材料の科学と技術フォーラム2014:第7回シリコンフォーラム), Program Committee Member

- 2014/09 The 46th International Conference on Solid State Devices and Materials (SSDM2014), Program Committee Member (Area 7: Photonic Devices and Related Technologies, Chair)

- 2014 Science and Technology of Advanced Materials, Focus on Silicon Photonics, vol. 15, no. 1/2, 2014, Guest Editor

- 2013/08 IEEE 10th International Conference on Group IV Photonics (GFP2013), Program Committee Member (Electro-Photonic Convergence on Silicon)

- 2013/07 The 10th Conference on Lasers and Electro-Optics Pacific Rim, and The 18th OptoElectronics and Communications Conference / Photonic in Switching 2013 (CLEO-PR & OECC/PS 2013), Technical Program Committee Member (J3: Silicon Photonics Platform)

- 2012/08 IEEE 9th International Conference on Group IV Photonics (GFP2012), Program Committee Member (Advanced Material and Fabrication Technologies)

- 2012/04 Materials Research Society (MRS) 2012 Spring Meeting, Symposium L “Group IV Photonics fro Sensing and Imaging”, Symposium Organizer

2011 - 2012 応用物理学会和文機関誌「応用物理」編集委員

- 2011/09 IEEE 8th International Conference on Group IV Photonics (GFP2011), Program Committee Member (Advanced Material and Fabrication Technologies)

- 2011/09 The 43rd International Conference on Solid State Devices and Materials (SSDM2011), Program Committee Member (Area 7: Photonic Devices and Optoelectronic Integration, Vice-Chair)

- 2010/11 The 23rd International Microprocesses and Nanotechnology Conference (MNC2010), Program Committee Member (2-2: Nanofabrication)

- 2010/11 The Forum on the Science and Technology of Silicon Materials 2010 (シリコン材料の科学と技術フォーラム2010:第6回シリコンフォーラム), Program Committee Member

- 2010/10 218th ECS Meeting, Symposium on SiGe/Ge and related compounds, Program Committee Member

- 2010/09 The 42nd International Conference on Solid State Devices and Materials (SSDM2010) Program Committee Member (Area 7: Photonic Devices and Optoelectronic Integration, Vice-Chair)

- 2010/07 15th OptoElectronics and Communications Conference (OECC2010), Technical Program Committee Member

- 2010/06 European Materials Research Society (E-MRS) 2010 Spring Meeting, Scientific Committee Member (Silicon-based nanophotonics)

- 2009/11 The 22nd International Microprocesses and Nanotechnology Conference (MNC2009), Program Committee Member (2-2: Nanofabrication)

- 2009/10 The 41st International Conference on Solid State Devices and Materials (SSDM2009), Program Committee Member (Area 7: Photonic Devices and Device Physics)

- 2008/11 The 21st International Microprocesses and Nanotechnology Conference (MNC2008), Program Committee Member (2-2: Nanofabrication)

- 2007/11 The 20th International Microprocesses and Nanotechnology Conference (MNC2007), Program Committee Member (2-2: Nanofabrication)

- 2006/10 The 19th International Microprocesses and Nanotechnology Conference (MNC2006), Program Committee Member (2-2: Nanofabrication)

- 2004/06 The Twelfth International Conference on Solid Films and Surfaces (ICSFS-12), Local Committee member

全件表示

所属学会 (5件)：

The Electrochemical Society , SPIE , IEEE , 応用物理学会 , 米国材料学会

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石川 靖彦

石川靖彦