松村亮

マツムラリョウ | Matsumura Ryo

所属機関・部署：
職名：主任研究員

研究分野 (1件)：電気電子材料工学

研究キーワード (3件)：結晶成長 , 電子デバイス , 半導体

競争的資金等の研究課題 (8件)：

全件表示

論文 (57件)：

Ryo Matsumura, Naoki Fukata. Direct Detection of Free H2Outgassing in Blisters Formed in Al2O3Atomic Layers Deposited on Si and Methods of Its Prevention. ACS Applied Materials and Interfaces. 2022. 14. 1. 1472-1477
Ryo Matsumura, Naoki Fukata. Formation of Free Hydrogen Gas By Annealing ALD-Al2O3/Si Stacked Structure. ECS Transactions. 2022. 108. 5. 57-61
Rahmat Hadi Saputro, Ryo Matsumura, Naoki Fukata. Crystallization Of Tensile Strained n-Type Ge By Continuous Wave Laser Annealing. ECS Transactions. 2022. 108. 5. 79-82
Rahmat Hadi Saputro, Ryo Matsumura, Naoki Fukata. Dopant Redistribution in High-Temperature-Grown Sb-Doped Ge Epitaxial Films. Crystal Growth and Design. 2021. 21. 11. 6523-6528
Ryo Matsumura, Satoshi Ishii, Naoki Fukata. Growth of SiGe thin films with uniform and non-uniform Si concentration profiles on insulating substrates by high-speed continuous wave laser annealing. Materials Science in Semiconductor Processing. 2021. 134. 106024-106024

MISC (4件)：

講演・口頭発表等 (11件)：

Analysis and control of Si segregation phenomena to achieve uniform-SiGe crystals on insulator by rapid-melting growth
(2015 International Electron Devices and Materials Symposium, IEDMS 2015 2015)
Segregation-Controlled Rapid-Melting Growth for Sige-on-Insulator with Uniform Lateral Composition
(24th International Materials Research Congress, IMRC2015 2015)
Low Temperature (<200oC) position controlled Solid Phase Crystallization of GeSn combined with Laser Anneal Seeding
(ICSI 9 2015)
Low-Temperature Crystallization of a-GeSn on Insulating Films for Next-Generation Flexible Electronics(1) Characteristics of Solid Phase Crystallization
(2014 International Electron Devices and Materials Symposium, IEDMS 2014 2014)
Segregation-Controlled Rapid-Melting Growth for Large-Grain and Uniform -Composition SiGe on Insulator” (JSPS International Core-to-Core Program Workshop on Atomically Controlled Processing for Ultra-large Scale Integration
(JSPS-imec 2014 2014)

学歴 (3件)：

学位 (1件)：

経歴 (5件)：

委員歴 (3件)：

受賞 (4件)：

2016/03 - 九州大学学生表彰
2016 - International Conference on Solid State Devices and Materials (SSDM) Young Researcher Award
2015/12 - 2015 International Electron Devices and Materials Symposium (IEDMS2015) Best Paper Award
2013 - 第5回半導体デバイスフォーラム講演奨励賞

所属学会 (1件)：

応用物理学会

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松村 亮