文献
J-GLOBAL ID:200902125315961148
整理番号:94A0298792
Preferred orientation of TAOx deposits prepared by KRF laser CVD.
著者 (6件):
WATANABE A
(National Inst. Materials and Chemical Research, Ibaraki, JPN)
,
IMAI Y
(National Inst. Materials and Chemical Research, Ibaraki, JPN)
,
MUKAIDA M
(National Inst. Materials and Chemical Research, Ibaraki, JPN)
,
OSATO K
(National Inst. Materials and Chemical Research, Ibaraki, JPN)
,
KAMEYAMA T
(National Inst. Materials and Chemical Research, Ibaraki, JPN)
,
FUKUDA K
(National Inst. Materials and Chemical Research, Ibaraki, JPN)
資料名:
1st International Conference on Processing Materials for Properties, 1993
(1st International Conference on Processing Materials for Properties, 1993)
ページ:
1245-1248
発行年:
1993年
JST資料番号:
K19940241
ISBN:
0-87339-256-6
資料種別:
会議録 (C)
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)