文献
J-GLOBAL ID:200902129399276807
整理番号:93A0732367
Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System.
著者 (6件):
CRESSWELL M W
(National Inst. Standards and Technology, Gaithersburg, MD, USA)
,
ALLEN R A
(National Inst. Standards and Technology, Gaithersburg, MD, USA)
,
LINHOLM L W
(National Inst. Standards and Technology, Gaithersburg, MD, USA)
,
ELLENWOOD C H
(National Inst. Standards and Technology, Gaithersburg, MD, USA)
,
PENZES W B
(National Inst. Standards and Technology, Gaithersburg, MD, USA)
,
TEAGUE E C
(National Inst. Standards and Technology, Gaithersburg, MD, USA)
資料名:
Proceedings. IEEE International Conference on Microelectronic Test Structures
(Proceedings. IEEE International Conference on Microelectronic Test Structures)
巻:
1993
ページ:
255-261
発行年:
1993年
JST資料番号:
T0991A
資料種別:
会議録 (C)
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)