文献
J-GLOBAL ID:200902159926315111
整理番号:93A0781535
Investigation of the Hydrogen Content of Silicon in an Integrated Rapid Thermal Processing Reactor.
著者 (6件):
GEORGE M A
(Lehigh Univ., PA)
,
BECK S E
(Air Products and Chemicals Inc., PA.)
,
BOHLING D A
(Air Products and Chemicals Inc., PA.)
,
HAMES G A
(North Carolina State Univ. NC.)
,
WORTMAN J J
(North Carolina State Univ. NC.)
,
MELZAK J A
(Case Western Reserve Univ., OH.)
資料名:
Chemical Perspectives of Microelectronic Materials 3
(Chemical Perspectives of Microelectronic Materials 3)
ページ:
481-492
発行年:
1993年
JST資料番号:
K19930443
ISBN:
1-55899-177-8
資料種別:
会議録 (C)
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)