文献
J-GLOBAL ID:200902182832343733
整理番号:94A0139537
Ridge-waveguide sidewall-grating distributed feedback structures fabricated by x-ray lithography.
著者 (7件):
WONG V V
(Massachusetts Inst. Technology, Massachusetts)
,
CHOI W-Y
(Massachusetts Inst. Technology, Massachusetts)
,
CARTER J M
(Massachusetts Inst. Technology, Massachusetts)
,
FONSTAD C G
(Massachusetts Inst. Technology, Massachusetts)
,
SMITH H I
(Massachusetts Inst. Technology, Massachusetts)
,
CHUNG Y
(Univ. California Santa Barbara, California)
,
DAGLI N
(Univ. California Santa Barbara, California)
資料名:
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures
(Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures)
巻:
11
号:
6
ページ:
2621-2624
発行年:
1993年11月
JST資料番号:
E0974A
ISSN:
1071-1023
CODEN:
JVTBD9
資料種別:
逐次刊行物 (A)
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)