文献
J-GLOBAL ID:200902187198337913
整理番号:99A0991395
ArFエキシマレーザによる光分解プロセスを用いた金属アセチルアセトナートと有機金属酸塩の金属酸化物薄膜への直接変換
Direct Conversion of Metal Acetylacetonates and Metal Organic Acid Salts into Metal Oxides Thin Films Using Coating Photolysis Process with An ArF Excimer Laser.
著者 (8件):
TSUCHIYA T
(National Inst. Materials and Chemical Res., Ibaraki, JPN)
,
WATANABE A
(National Inst. Materials and Chemical Res., Ibaraki, JPN)
,
IMAI Y
(National Inst. Materials and Chemical Res., Ibaraki, JPN)
,
NIINO H
(National Inst. Materials and Chemical Res., Ibaraki, JPN)
,
YAMAGUCHI I
(National Inst. Materials and Chemical Res., Ibaraki, JPN)
,
MANABE T
(National Inst. Materials and Chemical Res., Ibaraki, JPN)
,
KUMAGAI T
(National Inst. Materials and Chemical Res., Ibaraki, JPN)
,
MIZUTA S
(National Inst. Materials and Chemical Res., Ibaraki, JPN)
資料名:
Japanese Journal of Applied Physics. Part 2. Letters
(Japanese Journal of Applied Physics. Part 2. Letters)
巻:
38
号:
10A
ページ:
L1112-L1114
発行年:
1999年10月01日
JST資料番号:
F0599B
ISSN:
0021-4922
資料種別:
逐次刊行物 (A)
記事区分:
短報
発行国:
日本 (JPN)
言語:
英語 (EN)