文献
J-GLOBAL ID:200902190531680915
整理番号:97A0904349
Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applications.
著者 (8件):
MARXER C
(Univ. Neuch<span style=text-decoration:overline>a^</span>tel, Neuch<span style=text-decoration:overline>a^</span>tel, CHE)
,
THIO C
(Univ. Neuch<span style=text-decoration:overline>a^</span>tel, Neuch<span style=text-decoration:overline>a^</span>tel, CHE)
,
GRETILLAT M-A
(Univ. Neuch<span style=text-decoration:overline>a^</span>tel, Neuch<span style=text-decoration:overline>a^</span>tel, CHE)
,
DE ROOIJ N F
(Univ. Neuch<span style=text-decoration:overline>a^</span>tel, Neuch<span style=text-decoration:overline>a^</span>tel, CHE)
,
BAETTIG R
(Ascom Tech AG, Bern, CHE)
,
ANTHAMATTEN O
(Ascom Tech AG, Bern, CHE)
,
VALK B
(Ascom Tech AG, Bern, CHE)
,
VOGEL P
(Ascom Tech AG, Bern, CHE)
資料名:
Journal of Microelectromechanical Systems
(Journal of Microelectromechanical Systems)
巻:
6
号:
3
ページ:
277-285
発行年:
1997年09月
JST資料番号:
W0357A
ISSN:
1057-7157
CODEN:
JMIYET
資料種別:
逐次刊行物 (A)
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)