文献
J-GLOBAL ID:200902211440593375
整理番号:07A1233075
次世代極端紫外リソグラフィー用の高速シンチレータとしての水熱法成長大型酸化亜鉛単結晶
Hydrothermal method grown large-sized zinc oxide single crystal as fast scintillator for future extreme ultraviolet lithography
著者 (14件):
TANAKA Momoko
(Advanced Photon Res. Center, Japan Atomic Energy Agency, 8-1 Umemidai, Kizugawa, Kyoto 619-0215, JPN)
,
NISHIKINO Masaharu
(Advanced Photon Res. Center, Japan Atomic Energy Agency, 8-1 Umemidai, Kizugawa, Kyoto 619-0215, JPN)
,
YAMATANI Hiroshi
(Advanced Photon Res. Center, Japan Atomic Energy Agency, 8-1 Umemidai, Kizugawa, Kyoto 619-0215, JPN)
,
NAGASHIMA Keisuke
(Advanced Photon Res. Center, Japan Atomic Energy Agency, 8-1 Umemidai, Kizugawa, Kyoto 619-0215, JPN)
,
KIMURA Toyoaki
(Advanced Photon Res. Center, Japan Atomic Energy Agency, 8-1 Umemidai, Kizugawa, Kyoto 619-0215, JPN)
,
FURUKAWA Yusuke
(Inst. of Laser Engineering, Osaka Univ., 2-6 Yamadaoka, Suita, Osaka 565-0871, JPN)
,
MURAKAMI Hidetoshi
(Inst. of Laser Engineering, Osaka Univ., 2-6 Yamadaoka, Suita, Osaka 565-0871, JPN)
,
SAITO Shigeki
(Inst. of Laser Engineering, Osaka Univ., 2-6 Yamadaoka, Suita, Osaka 565-0871, JPN)
,
SARUKURA Nobuhiko
(Inst. of Laser Engineering, Osaka Univ., 2-6 Yamadaoka, Suita, Osaka 565-0871, JPN)
,
NISHIMURA Hiroaki
(Inst. of Laser Engineering, Osaka Univ., 2-6 Yamadaoka, Suita, Osaka 565-0871, JPN)
,
MIMA Kunioki
(Inst. of Laser Engineering, Osaka Univ., 2-6 Yamadaoka, Suita, Osaka 565-0871, JPN)
,
KAGAMITANI Yuji
(Inst. of Multidisciplinary Res. for Advanced Materials, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JPN)
,
EHRENTRAUT Dirk
(Inst. of Multidisciplinary Res. for Advanced Materials, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JPN)
,
FUKUDA Tsuguo
(Inst. of Multidisciplinary Res. for Advanced Materials, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JPN)
資料名:
Applied Physics Letters
(Applied Physics Letters)
巻:
91
号:
23
ページ:
231117-231117-3
発行年:
2007年12月03日
JST資料番号:
H0613A
ISSN:
0003-6951
CODEN:
APPLAB
資料種別:
逐次刊行物 (A)
記事区分:
短報
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)