文献
J-GLOBAL ID:200902211609859345
整理番号:08A0231843
ガラス表面洗浄用の超高電子密度の非平衡大気圧プラズマと高性能
Nonequilibrium atmospheric pressure plasma with ultrahigh electron density and high performance for glass surface cleaning
著者 (7件):
IWASAKI Masahiro
(Dep. of Electrical Engineering and Computer Sci., Graduate School of Engineering, Nagoya Univ., Furo-cho, Chikusa-ku ...)
,
INUI Hirotoshi
(Dep. of Electrical and Electronic Engineering, Graduate School of Sci. and Technol., Meijo Univ., 1-501 ...)
,
MATSUDAIRA Yuto
(Dep. of Electrical Engineering and Computer Sci., Graduate School of Engineering, Nagoya Univ., Furo-cho, Chikusa-ku ...)
,
KANO Hiroyuki
(NU Eco-Engineering Co., Ltd., 1237-87 Kurozawa, Miyoshi-cho, Nishikamo-gun, Aichi 470-0201, JPN)
,
YOSHIDA Naofumi
(Fuji Machine Mfg. Co., Ltd., 19 Chausuyama, Yamamachi, Chiryu, Aichi 472-8686, JPN)
,
ITO Masafumi
(Dep. of Opto-Mechatronics, Fac. of Systems Engineering, Wakayama Univ., 930 Sakaedani, Wakayama 640-8510, JPN)
,
HORI Masaru
(Dep. of Electrical Engineering and Computer Sci., Graduate School of Engineering, Nagoya Univ., Furo-cho, Chikusa-ku ...)
資料名:
Applied Physics Letters
(Applied Physics Letters)
巻:
92
号:
8
ページ:
081503
発行年:
2008年02月25日
JST資料番号:
H0613A
ISSN:
0003-6951
CODEN:
APPLAB
資料種別:
逐次刊行物 (A)
記事区分:
短報
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)