文献
J-GLOBAL ID:200902213915050633
整理番号:09A0159494
マグネトロンスパッタリング蒸着におけるYBaCuO薄膜結晶成長のための前駆体の解析
Analysis of precursors for crystal growth of YBaCuO thin films in magnetron sputtering deposition
著者 (8件):
FUKAYA Kota
(Dep. of Electrical Engineering and Computer Sci., Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN)
,
SASAKI Koichi
(Plasma Nanotechnology Res. Center, Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN)
,
GAO Junsi
(Dep. of Electrical Engineering and Computer Sci., Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN)
,
KIMURA Taishi
(Dep. of Quantum Engineering, Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN)
,
WATANABE Mitsuhiro
(Dep. of Quantum Engineering, Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN)
,
INOUE Masumi
(Dep. of Quantum Engineering, Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN)
,
FUJIMAKI Akira
(Dep. of Quantum Engineering, Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN)
,
SUGAI Hideo
(Dep. of Electronics and Information Engineering, Chubu Univ., Matsumoto-cho, Kasugai 487-8501, JPN)
資料名:
Thin Solid Films
(Thin Solid Films)
巻:
517
号:
8
ページ:
2762-2766
発行年:
2009年02月27日
JST資料番号:
B0899A
ISSN:
0040-6090
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)