文献
J-GLOBAL ID:200902227016156864
整理番号:09A0462151
非晶質炭素膜の形成およびその光学特性とガスバリヤ性の評価
Preparation of Amorphous Carbon Films and Evaluation of Its Optical Properties and Gas Barrier Property
著者 (6件):
OHSONE Yuuki
(Tokyo Inst. of Technol., Dept. of Mechanical Sci. and Eng.)
,
NISHI Hidetaka
(Tokyo Inst. of Technol., Dept. of Mechanical Sci. and Eng.)
,
SAITO Masanori
(Tokyo Inst. of Technol., Dept. of Mechanical Sci. and Eng.)
,
SUZUKI Masaki
(Tokyo Inst. of Technol., Dept. of Mechanical Sci. and Eng.)
,
MURAKAMI Hiroya
(Tokyo Inst. of Technol., Dept. of Mechanical Sci. and Eng.)
,
OHTAKE Naoto
(Nagoya Univ., Dept. of Materials, Physics and Energy Eng.)
資料名:
Journal of Solid Mechanics and Materials Engineering (Web)
(Journal of Solid Mechanics and Materials Engineering (Web))
巻:
3
号:
4
ページ:
691-697 (J-STAGE)
発行年:
2009年
JST資料番号:
U0026A
ISSN:
1880-9871
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
日本 (JPN)
言語:
英語 (EN)