文献
J-GLOBAL ID:200902231619053471
整理番号:07A0488516
HF溶液中におけるPt触媒を用いた無電解化学エッチングによるSiC表面の原子スケール的平坦化
Atomic-scale flattening of SiC surfaces by electroless chemical etching in HF solution with Pt catalyst
著者 (9件):
ARIMA Kenta
(Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamada-oka, Suita, Osaka ...)
,
HARA Hideyuki
(Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamada-oka, Suita, Osaka ...)
,
MURATA Junji
(Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamada-oka, Suita, Osaka ...)
,
ISHIDA Takeshi
(Res. Center for Ultra-Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamada-oka ...)
,
OKAMOTO Ryota
(Res. Center for Ultra-Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamada-oka ...)
,
YAGI Keita
(Res. Center for Ultra-Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamada-oka ...)
,
SANO Yasuhisa
(Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamada-oka, Suita, Osaka ...)
,
MIMURA Hidekazu
(Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamada-oka, Suita, Osaka ...)
,
YAMAUCHI Kazuto
(Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamada-oka, Suita, Osaka ...)
資料名:
Applied Physics Letters
(Applied Physics Letters)
巻:
90
号:
20
ページ:
202106-202106-3
発行年:
2007年05月14日
JST資料番号:
H0613A
ISSN:
0003-6951
CODEN:
APPLAB
資料種別:
逐次刊行物 (A)
記事区分:
短報
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)