文献
J-GLOBAL ID:200902234462558433
整理番号:04A0255432
超低k有機ポリマにおける弾性定数と誘電率の分子軌道計算
Molecular Orbital Calculation of the Elastic Modulus and the Dielectric Constant for Ultra Low-k Organic Polymers
著者 (5件):
UERA K
(National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
KAWAHARA J
(Assoc. Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN)
,
MIYOSHI H
(Assoc. Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN)
,
HATA N
(National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
KIKKAWA T
(National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
資料名:
Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers
(Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers)
巻:
43
号:
2
ページ:
504-507
発行年:
2004年02月15日
JST資料番号:
G0520B
ISSN:
0021-4922
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
日本 (JPN)
言語:
英語 (EN)