文献
J-GLOBAL ID:200902257468852864
整理番号:09A0604786
フィルタ真空アークにより生成したアルゴン支配プラズマビーム及びその基板エッチング
Argon-dominated plasma beam generated by filtered vacuum arc and its substrate etching
著者 (12件):
TANOUE Hideto
(Dep. of Electrical and Electronic Engineering, Toyohashi Univ. of Technol., 1-1 Hibarigaoka, Tempaku, Toyohashi ...)
,
KAMIYA Masao
(Dep. of Electrical and Electronic Engineering, Toyohashi Univ. of Technol., 1-1 Hibarigaoka, Tempaku, Toyohashi ...)
,
KAMIYA Masao
(Itoh Optical Industrial Co., Ltd., 3-19 Miyanari, Gamagori, Aichi 443-0041, JPN)
,
OKE Shinichiro
(Dep. of Electrical and Electronic Engineering, Toyohashi Univ. of Technol., 1-1 Hibarigaoka, Tempaku, Toyohashi ...)
,
SUDA Yoshiyuki
(Dep. of Electrical and Electronic Engineering, Toyohashi Univ. of Technol., 1-1 Hibarigaoka, Tempaku, Toyohashi ...)
,
TAKIKAWA Hirofumi
(Dep. of Electrical and Electronic Engineering, Toyohashi Univ. of Technol., 1-1 Hibarigaoka, Tempaku, Toyohashi ...)
,
HASEGAWA Yushi
(Onward Ceramic Coating Co., Ltd., Wa-13 Yoshihara, Nomi, Ishikawa 929-0111, JPN)
,
TAKI Makoto
(Onward Ceramic Coating Co., Ltd., Wa-13 Yoshihara, Nomi, Ishikawa 929-0111, JPN)
,
KUMAGAI Masao
(Kanagawa Industrial Technol. Res. Center, 705-1, Shimoimaizumi, Ebina, Kanagawa 243-0435, JPN)
,
KANO Makoto
(Kanagawa Industrial Technol. Res. Center, 705-1, Shimoimaizumi, Ebina, Kanagawa 243-0435, JPN)
,
ISHIKAWA Takeshi
(Hitachi Tool Engineering, Ltd., 13-2, Ninomi, Narita, Chiba 286-0825, JPN)
,
YASUI Haruyuki
(Industrial Res. Inst. of Ishikawa, 2-1, Kuratsuki, Kanazawa, Ishikawa 929-8203, JPN)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
255
号:
17
ページ:
7780-7785
発行年:
2009年06月15日
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)