文献
J-GLOBAL ID:200902267884888822
整理番号:06A0605831
(001)ダイアモンド上での水素プラズマエッチング機構
Hydrogen plasma etching mechanism on (001) diamond
著者 (12件):
RI Sung-gi
(Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...)
,
RI Sung-gi
(Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN)
,
WATANABE Hideyuki
(Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...)
,
WATANABE Hideyuki
(Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN)
,
OGURA Masahiko
(Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...)
,
OGURA Masahiko
(Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN)
,
TAKEUCHI Daisuke
(Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...)
,
TAKEUCHI Daisuke
(Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN)
,
YAMASAKI Satoshi
(Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...)
,
YAMASAKI Satoshi
(Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN)
,
OKUSHI Hideyo
(Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...)
,
OKUSHI Hideyo
(Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN)
資料名:
Journal of Crystal Growth
(Journal of Crystal Growth)
巻:
293
号:
2
ページ:
311-317
発行年:
2006年08月01日
JST資料番号:
B0942A
ISSN:
0022-0248
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)