文献
J-GLOBAL ID:200902277119986382
整理番号:05A0013670
XeとSn放電プラズマを用いるEUV源
EUV sources using Xe and Sn discharge plasmas
著者 (9件):
BORISOV V M
(State Res. Centre of the Russian Federation-Troitsk Inst. for Innovation & Fusion Res., Moscow Region, RUS)
,
ELTSOV A V
(State Res. Centre of the Russian Federation-Troitsk Inst. for Innovation & Fusion Res., Moscow Region, RUS)
,
IVANOV A S
(State Res. Centre of the Russian Federation-Troitsk Inst. for Innovation & Fusion Res., Moscow Region, RUS)
,
KIRYUKHIN Y B
(State Res. Centre of the Russian Federation-Troitsk Inst. for Innovation & Fusion Res., Moscow Region, RUS)
,
KHRISTOFOROV O B
(State Res. Centre of the Russian Federation-Troitsk Inst. for Innovation & Fusion Res., Moscow Region, RUS)
,
MISHCHENKO V A
(State Res. Centre of the Russian Federation-Troitsk Inst. for Innovation & Fusion Res., Moscow Region, RUS)
,
PROKOFIEV A V
(State Res. Centre of the Russian Federation-Troitsk Inst. for Innovation & Fusion Res., Moscow Region, RUS)
,
VINOKHODOV A YU
(State Res. Centre of the Russian Federation-Troitsk Inst. for Innovation & Fusion Res., Moscow Region, RUS)
,
VODCHITS V A
(State Res. Centre of the Russian Federation-Troitsk Inst. for Innovation & Fusion Res., Moscow Region, RUS)
資料名:
Journal of Physics. D. Applied Physics
(Journal of Physics. D. Applied Physics)
巻:
37
号:
23
ページ:
3254-3265
発行年:
2004年12月07日
JST資料番号:
B0092B
ISSN:
0022-3727
CODEN:
JPAPBE
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)