文献
J-GLOBAL ID:201002240166641725
整理番号:10A1376625
CVD膜蒸着シミュレータの計算プロセスの自動モデリングシステム
An Automatic Modeling System of the Calculation Process of a CVD Film Deposition Simulator
著者 (5件):
TAKAHASHI Takahiro
(Dep. of Electrical and Electronic Engineering, Fac. of Engineering, Shizuoka Univ.)
,
FUKUI Noriyuki
(Dep. of Electrical and Electronic Engineering, Fac. of Engineering, Shizuoka Univ.)
,
ARAKAWA Masamoto
(Dep. of Chemical System Engineering, School of Engineering, The Univ. of Tokyo)
,
FUNATSU Kimito
(Dep. of Chemical System Engineering, School of Engineering, The Univ. of Tokyo)
,
EMA Yoshinori
(Dep. of Electrical and Electronic Engineering, Fac. of Engineering, Shizuoka Univ.)
資料名:
Journal of Chemical Engineering of Japan
(Journal of Chemical Engineering of Japan)
巻:
43
号:
11
ページ:
977-982 (J-STAGE)
発行年:
2010年
JST資料番号:
S0629A
ISSN:
0021-9592
CODEN:
JCEJAQ
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
日本 (JPN)
言語:
英語 (EN)