文献
J-GLOBAL ID:201202205455604387
整理番号:12A0437199
薄いSiGeエピ層の熱信頼性
Thermal reliability of thin SiGe epilayers
著者 (6件):
WU Ming-jhang
(Dep. of Mechanical Engineering, National Chiao Tung Univ., Hsinchu 300, Taiwan, TWN)
,
WEN Hua-chiang
(Dep. of Materials Sci. and Engineering, National Tsing Hua Univ., Hsinchu, 30013, Taiwan, TWN)
,
CHIANG Tun-yuan
(Dep. of Mechanical Engineering, Chin-Yi Univ. of Technol., Taichung 411, Taiwan, TWN)
,
TSAI Chien-huang
(Dep. of Automation Engineering, Nan Kai Univ. of Technol., Nantou 54243, Taiwan, TWN)
,
HSU Wen-kuang
(Dep. of Materials Sci. and Engineering, National Tsing Hua Univ., Hsinchu, 30013, Taiwan, TWN)
,
CHOU Chang-pin
(Dep. of Mechanical Engineering, National Chiao Tung Univ., Hsinchu 300, Taiwan, TWN)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
258
号:
12
ページ:
5001-5004
発行年:
2012年04月01日
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)