文献
J-GLOBAL ID:201202213666402783
整理番号:12A1429716
低k1のための重ね合わせメトロロジ:挑戦とソリューション
Overlay metrology for low-k1: Challenges and solutions
著者 (15件):
NEUMANN Jens Timo
(Carl Zeiss SMT GmbH, Oberkochen, DEU)
,
LEE Jongsu
(Hynix Semiconductor Inc., Kyungki-do, KOR)
,
YANG Kiho
(Hynix Semiconductor Inc., Kyungki-do, KOR)
,
LEE Byounghoon
(Hynix Semiconductor Inc., Kyungki-do, KOR)
,
LEE Taehyeong
(Hynix Semiconductor Inc., Kyungki-do, KOR)
,
PARK Jeongsu
(Hynix Semiconductor Inc., Kyungki-do, KOR)
,
LIM Chang-Moon
(Hynix Semiconductor Inc., Kyungki-do, KOR)
,
YIM Donggyu
(Hynix Semiconductor Inc., Kyungki-do, KOR)
,
PARK Sungki
(Hynix Semiconductor Inc., Kyungki-do, KOR)
,
JANDA Eric
(ASML, Veldhoven, NLD)
,
BHATTACHARYYA Kaustuve
(ASML, Veldhoven, NLD)
,
RYU Chan-Ho
(ASML Korea, Gyunggi-do, KOR)
,
MIN Young-Hong
(ASML Korea, Gyunggi-do, KOR)
,
RHE Kiki
(ASML Korea, Gyunggi-do, KOR)
,
GEH Bernd
(Carl Zeiss S.M.T. Inc., AZ, USA)
資料名:
Proceedings of SPIE
(Proceedings of SPIE)
巻:
8326
号:
Pt.1
ページ:
832602.1-832602.21
発行年:
2012年
JST資料番号:
D0943A
ISSN:
0277-786X
CODEN:
PSISDG
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)