文献
J-GLOBAL ID:201202217843781086
整理番号:12A1000540
Be注入したInAs0.93Sb0.07膜における損傷蓄積及びアニーリング特性
Damage buildup and annealing characteristics in Be-implanted InAs0.93Sb0.07 film
著者 (11件):
WANG Q.w.
(National Lab. for Infrared Physics, Shanghai Inst. of Technical Physics, Chinese Acad. of Sciences, Shanghai 200083 ...)
,
SUN C.h.
(National Lab. for Infrared Physics, Shanghai Inst. of Technical Physics, Chinese Acad. of Sciences, Shanghai 200083 ...)
,
HU S.h.
(National Lab. for Infrared Physics, Shanghai Inst. of Technical Physics, Chinese Acad. of Sciences, Shanghai 200083 ...)
,
WEI L.m.
(National Lab. for Infrared Physics, Shanghai Inst. of Technical Physics, Chinese Acad. of Sciences, Shanghai 200083 ...)
,
WU J.
(National Lab. for Infrared Physics, Shanghai Inst. of Technical Physics, Chinese Acad. of Sciences, Shanghai 200083 ...)
,
SUN Y.
(National Lab. for Infrared Physics, Shanghai Inst. of Technical Physics, Chinese Acad. of Sciences, Shanghai 200083 ...)
,
HU G.j.
(National Lab. for Infrared Physics, Shanghai Inst. of Technical Physics, Chinese Acad. of Sciences, Shanghai 200083 ...)
,
YU G.
(National Lab. for Infrared Physics, Shanghai Inst. of Technical Physics, Chinese Acad. of Sciences, Shanghai 200083 ...)
,
CHEN X.
(National Lab. for Infrared Physics, Shanghai Inst. of Technical Physics, Chinese Acad. of Sciences, Shanghai 200083 ...)
,
DENG H.y.
(National Lab. for Infrared Physics, Shanghai Inst. of Technical Physics, Chinese Acad. of Sciences, Shanghai 200083 ...)
,
DAI N.
(National Lab. for Infrared Physics, Shanghai Inst. of Technical Physics, Chinese Acad. of Sciences, Shanghai 200083 ...)
資料名:
Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms
(Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)
巻:
285
ページ:
11-17
発行年:
2012年08月15日
JST資料番号:
H0899A
ISSN:
0168-583X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)