文献
J-GLOBAL ID:201202224006157222
整理番号:12A1466391
28nmを超えるノードでのBEOLへのCPI課題
CPI Challenges to BEOL at 28nm Node and Beyond
著者 (14件):
RYAN Vivian
(GLOBALFOUNDRIES Inc., NY, USA)
,
BREUER Dirk
(GLOBALFOUNDRIES Inc., Dresden, DEU)
,
GEISLER Holm
(GLOBALFOUNDRIES Inc., Dresden, DEU)
,
KIOUSSIS Dimitri
(GLOBALFOUNDRIES Inc., NY, USA)
,
LEHR Matthias U.
(GLOBALFOUNDRIES Inc., Dresden, DEU)
,
PAUL Jens
(GLOBALFOUNDRIES Inc., Dresden, DEU)
,
MACHANI Kashi
(GLOBALFOUNDRIES Inc., Dresden, DEU)
,
SHAH Chirag
(GLOBALFOUNDRIES Inc., CA, USA)
,
KOSGALWIES Sven
(GLOBALFOUNDRIES Inc., Dresden, DEU)
,
LEHMANN Lothar
(GLOBALFOUNDRIES Inc., Dresden, DEU)
,
LEE Jaesik
(GLOBALFOUNDRIES Inc., Dresden, DEU)
,
KUECHENMEISTER Frank
(GLOBALFOUNDRIES Inc., Dresden, DEU)
,
RYAN E.Todd
(GLOBALFOUNDRIES Inc., NY, USA)
,
KARIMANAL Kamal
(GLOBALFOUNDRIES Inc., CA, USA)
資料名:
Annual Proceedings. IEEE International Reliability Physics Symposium
(Annual Proceedings. IEEE International Reliability Physics Symposium)
巻:
2012 Vol.1
ページ:
101-106
発行年:
2012年
JST資料番号:
A0631A
ISSN:
1541-7026
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)