文献
J-GLOBAL ID:201202224518027525
整理番号:12A1692169
Ti2AlN化合物ターゲットから高出力インパルスマグネトロンスパッタリング法で合成したナノ結晶薄膜
Nanocrystalline thin films synthesized from a Ti2AlN compound target by high power impulse magnetron sputtering technique
著者 (9件):
ZHANG Teng Fei
(School of Materials Sci. and Engineering, Pusan National Univ., Busan 609-735, KOR)
,
ZHANG Teng Fei
(National Core Res. Center for Hybrid Materials Solution, Pusan National Univ., Busan 609-735, KOR)
,
WANG Qi Min
(National Core Res. Center for Hybrid Materials Solution, Pusan National Univ., Busan 609-735, KOR)
,
WANG Qi Min
(School of Electromechanical Engineering, Guangdong Univ. of Technol., Guangzhou 510006, CHN)
,
LEE Junghoon
(School of Materials Sci. and Engineering, Pusan National Univ., Busan 609-735, KOR)
,
KE Peiling
(Div. of Surface Engineering, Ningbo Inst. of Materials Technol. and Engineering, Chinese Acad. of Sciences, Ningbo ...)
,
NOWAK Roman
(Nordic Hysitron Lab., Dep. of Materials Sci. & Engineering, Aalto Univ., 00076 Aalto, FIN)
,
KIM Kwang Ho
(School of Materials Sci. and Engineering, Pusan National Univ., Busan 609-735, KOR)
,
KIM Kwang Ho
(National Core Res. Center for Hybrid Materials Solution, Pusan National Univ., Busan 609-735, KOR)
資料名:
Surface & Coatings Technology
(Surface & Coatings Technology)
巻:
212
ページ:
199-206
発行年:
2012年11月
JST資料番号:
D0205C
ISSN:
0257-8972
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)