文献
J-GLOBAL ID:201202231732286887
整理番号:12A0604197
レーザ熱リソグラフィーによるAgInSbTe相変化膜の選択エッチング特性
Selective etching characteristics of the AgInSbTe phase-change film in laser thermal lithography
著者 (6件):
LI Hao
(Chinese Acad. of Sciences, Key Lab. of Material Sci. and Technol. for High Power Lasers, Shanghai Inst. of Optics ...)
,
LI Hao
(Graduate School of the Chinese Acad. of Sci., 100039, Beijing, P.R. China)
,
GENG Yongyou
(Chinese Acad. of Sciences, Key Lab. of Material Sci. and Technol. for High Power Lasers, Shanghai Inst. of Optics ...)
,
WU Yiqun
(Chinese Acad. of Sciences, Key Lab. of Material Sci. and Technol. for High Power Lasers, Shanghai Inst. of Optics ...)
,
WU Yiqun
(Ministry of Education, Key Lab. of Functional Inorganic Material Chemistry, Heilongjiang Univ., 150080, Harbin, P.R. ...)
,
WU Yiqun
(Chinese Acad. of Sciences, Shanghai Inst. of Optics and Fine Mechanics, No. 390, Qinghe Road, Jiading District, P.O. ...)
資料名:
Applied Physics. A. Materials Science & Processing
(Applied Physics. A. Materials Science & Processing)
巻:
107
号:
1
ページ:
221-225
発行年:
2012年04月
JST資料番号:
D0256C
ISSN:
0947-8396
CODEN:
APHYCC
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
ドイツ (DEU)
言語:
英語 (EN)