文献
J-GLOBAL ID:201202236981757263
整理番号:12A0546380
ITO膜のパルスレーザ蒸着とその特性
Pulsed laser deposition of ITO thin films and their characteristics
著者 (10件):
ZUEV D. A.
(Russian Acad. of Sciences, Inst. on Laser and Information Technologies, ul. Svyatoozerskaya 1, 140700, Shatura ...)
,
LOTIN A. A.
(Russian Acad. of Sciences, Inst. on Laser and Information Technologies, ul. Svyatoozerskaya 1, 140700, Shatura ...)
,
NOVODVORSKY O. A.
(Russian Acad. of Sciences, Inst. on Laser and Information Technologies, ul. Svyatoozerskaya 1, 140700, Shatura ...)
,
LEBEDEV F. V.
(Russian Acad. of Sciences, Inst. on Laser and Information Technologies, ul. Svyatoozerskaya 1, 140700, Shatura ...)
,
KHRAMOVA O. D.
(Russian Acad. of Sciences, Inst. on Laser and Information Technologies, ul. Svyatoozerskaya 1, 140700, Shatura ...)
,
PETUHOV I. A.
(Moscow State Univ., Fac. of Chemistry, 119899, Moscow, RUS)
,
PUTILIN Ph. N.
(Moscow State Univ., Fac. of Chemistry, 119899, Moscow, RUS)
,
SHATOHIN A. N.
(Moscow State Univ., Fac. of Chemistry, 119899, Moscow, RUS)
,
RUMYANZEVA M. N.
(Moscow State Univ., Fac. of Chemistry, 119899, Moscow, RUS)
,
GASKOV A. M.
(Moscow State Univ., Fac. of Chemistry, 119899, Moscow, RUS)
資料名:
Semiconductors
(Semiconductors)
巻:
46
号:
3
ページ:
410-413
発行年:
2012年03月
JST資料番号:
T0093A
ISSN:
1063-7826
CODEN:
SMICES
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)