文献
J-GLOBAL ID:201202241852711188
整理番号:12A1032438
パルス直流マグネトロンスパッタリングにより調製した表面テクスチャ化ZnO:Al膜に及ぼすNaOH溶液の影響
Effect of NaOH solution on surface textured ZnO: Al films prepared by pulsed direct current magnetron sputtering
著者 (10件):
WANG Ying
(School of Materials Sci. and Engineering, Dalian Jiaotong Univ., Dalian 116028, CHN)
,
WANG Ying
(Engineering Res. Center of Optoelectronic Materials and Devices, Education Dep. of Liaoning Province, Dalian 116028, CHN)
,
WANG Hualin
(School of Materials Sci. and Engineering, Dalian Jiaotong Univ., Dalian 116028, CHN)
,
WANG Hualin
(Engineering Res. Center of Optoelectronic Materials and Devices, Education Dep. of Liaoning Province, Dalian 116028, CHN)
,
LIU Chaoqian
(School of Materials Sci. and Engineering, Dalian Jiaotong Univ., Dalian 116028, CHN)
,
LIU Chaoqian
(Engineering Res. Center of Optoelectronic Materials and Devices, Education Dep. of Liaoning Province, Dalian 116028, CHN)
,
WANG Yun
(Bengbu Design & Res. Inst. for Glass Ind., Bengbu 233018, CHN)
,
PENG Shou
(China Triumph International Engineering Co., Ltd., Bengbu 233018, CHN)
,
CHAI Weiping
(School of Materials Sci. and Engineering, Dalian Jiaotong Univ., Dalian 116028, CHN)
,
CHAI Weiping
(Engineering Res. Center of Optoelectronic Materials and Devices, Education Dep. of Liaoning Province, Dalian 116028, CHN)
資料名:
Materials Science in Semiconductor Processing
(Materials Science in Semiconductor Processing)
巻:
15
号:
5
ページ:
555-558
発行年:
2012年10月
JST資料番号:
W1055A
ISSN:
1369-8001
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)