文献
J-GLOBAL ID:201202248358277046
整理番号:12A0746473
同時スパッタリングプロセスにより蒸着させたチタン酸亜鉛薄膜のナノインデンテーション応答
Nanoindentation response of zinc titanate thin films deposited by co-sputtering process
著者 (7件):
WU Shyh-chi
(Dep. of Mechanical Engineering, National Chiao Tung Univ., Hsinchu 300, Taiwan, TWN)
,
WU Shyh-chi
(Chung Shan Inst. of Sci. and Technol. (CSIST), Taoyuan 325, Taiwan, TWN)
,
JENG Yeau-ren
(Dep. of Mechanical Engineering, National Chung Cheng Univ., Chia-Yi 621, Taiwan)
,
YAU Wei-hung
(Dep. of Mechanical Engineering, Chin-Yi Univ. of Technol., Taichung 400, Taiwan, TWN)
,
WU Kuan-te
(Dep. of Mechanical Engineering, National Chung Cheng Univ., Chia-Yi 621, Taiwan)
,
TSAI Chien-huang
(Dep. of Automation Engineering, Nan Kai Univ. of Technol., Nantou 54243, Taiwan, TWN)
,
CHOU Chang-pin
(Dep. of Mechanical Engineering, National Chiao Tung Univ., Hsinchu 300, Taiwan, TWN)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
258
号:
18
ページ:
6730-6734
発行年:
2012年07月01日
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)