文献
J-GLOBAL ID:201202251985803382
整理番号:12A0256754
走査型マイクロ波顕微鏡法を使うキャリブレートされたナノスケールドーパントプロファイリング
Calibrated nanoscale dopant profiling using a scanning microwave microscope
著者 (14件):
HUBER H. P.
(Univ. of Linz, Christian Doppler Lab. for Nanoscopic Methods in Biophysics, Altenbergerstrasse 69, 4040 Linz, AUT)
,
HUMER I.
(Technical Univ. of Vienna, Inst. for Solid State Electronics, 1040 Vienna, AUT)
,
HOCHLEITNER M.
(Univ. of Linz, Christian Doppler Lab. for Nanoscopic Methods in Biophysics, Altenbergerstrasse 69, 4040 Linz, AUT)
,
FENNER M.
(Agilent Technologies, Inc., 5301 Stevens Creek Blvd., Santa Clara, California 95051, USA)
,
MOERTELMAIER M.
(Agilent Technologies, Inc., 5301 Stevens Creek Blvd., Santa Clara, California 95051, USA)
,
RANKL C.
(Agilent Technologies, Inc., 5301 Stevens Creek Blvd., Santa Clara, California 95051, USA)
,
IMTIAZ A.
(National Inst. for Standards and Technol., Electromagnetic Div., 325 Broadway, Boulder, Colorado 80305-3337, USA)
,
WALLIS T. M.
(National Inst. for Standards and Technol., Electromagnetic Div., 325 Broadway, Boulder, Colorado 80305-3337, USA)
,
TANBAKUCHI H.
(Agilent Technologies, Inc., 5301 Stevens Creek Blvd., Santa Clara, California 95051, USA)
,
HINTERDORFER P.
(Univ. of Linz, Christian Doppler Lab. for Nanoscopic Methods in Biophysics, Altenbergerstrasse 69, 4040 Linz, AUT)
,
KABOS P.
(National Inst. for Standards and Technol., Electromagnetic Div., 325 Broadway, Boulder, Colorado 80305-3337, USA)
,
SMOLINER J.
(Technical Univ. of Vienna, Inst. for Solid State Electronics, 1040 Vienna, AUT)
,
KOPANSKI J. J.
(National Inst. of Standards and Technol., Semiconductor Measurements Div., Gaithersburg, Maryland 20899-8120, USA)
,
KIENBERGER F.
(Agilent Technologies, Inc., 5301 Stevens Creek Blvd., Santa Clara, California 95051, USA)
資料名:
Journal of Applied Physics
(Journal of Applied Physics)
巻:
111
号:
1
ページ:
014301
発行年:
2012年01月01日
JST資料番号:
C0266A
ISSN:
0021-8979
CODEN:
JAPIAU
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)