文献
J-GLOBAL ID:201202258323526804
整理番号:12A0783891
圧電性マグネトロンスパッタw-ScxAl1-xN薄膜の微細構造と誘電性
Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1-xN thin films
著者 (10件):
ZUKAUSKAITE Agne
(Thin Film Physics Div., Dep. of Physics, Chemistry, and Biology (IFM), Linkoeping Univ., SE-581 83 Linkoeping, SWE)
,
WINGQVIST Gunilla
(Thin Film Physics Div., Dep. of Physics, Chemistry, and Biology (IFM), Linkoeping Univ., SE-581 83 Linkoeping, SWE)
,
PALISAITIS Justinas
(Thin Film Physics Div., Dep. of Physics, Chemistry, and Biology (IFM), Linkoeping Univ., SE-581 83 Linkoeping, SWE)
,
JENSEN Jens
(Thin Film Physics Div., Dep. of Physics, Chemistry, and Biology (IFM), Linkoeping Univ., SE-581 83 Linkoeping, SWE)
,
PERSSON Per O. A.
(Thin Film Physics Div., Dep. of Physics, Chemistry, and Biology (IFM), Linkoeping Univ., SE-581 83 Linkoeping, SWE)
,
MATLOUB Ramin
(Ceramics Lab., Ecole Polytechnique Federale de Lausanne EPFL, Lausanne, CHE)
,
MURALT Paul
(Ceramics Lab., Ecole Polytechnique Federale de Lausanne EPFL, Lausanne, CHE)
,
KIM Yunseok
(Center for Nanophase Materials Sciences, Oak Ridge National Lab., Oak Ridge, Tennessee 37831, USA)
,
BIRCH Jens
(Thin Film Physics Div., Dep. of Physics, Chemistry, and Biology (IFM), Linkoeping Univ., SE-581 83 Linkoeping, SWE)
,
HULTMAN Lars
(Thin Film Physics Div., Dep. of Physics, Chemistry, and Biology (IFM), Linkoeping Univ., SE-581 83 Linkoeping, SWE)
資料名:
Journal of Applied Physics
(Journal of Applied Physics)
巻:
111
号:
9
ページ:
093527-093527-7
発行年:
2012年05月01日
JST資料番号:
C0266A
ISSN:
0021-8979
CODEN:
JAPIAU
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)