文献
J-GLOBAL ID:201202260036093080
整理番号:12A0111505
ケイ素リッチな窒化ケイ素薄膜に埋め込まれたケイ素ナノ結晶に対するエキシマレーザアニールの影響
Effect of excimer laser annealing on the silicon nanocrystals embedded in silicon-rich silicon nitride film
著者 (10件):
CHEN Rui
(Xiamen Univ., Semiconductor Photonics Res. Centre, Dep. of Physics, 361005, Xiamen, Fujain, People’s Republic of China)
,
CHEN Rui
(Nanyang Technological Univ., Div. of Physics and Applied Physics, School of Physical and Mathematical Sciences ...)
,
QI D. F.
(Xiamen Univ., Semiconductor Photonics Res. Centre, Dep. of Physics, 361005, Xiamen, Fujain, People’s Republic of China)
,
RUAN Y. J.
(Xiamen Univ., Semiconductor Photonics Res. Centre, Dep. of Physics, 361005, Xiamen, Fujain, People’s Republic of China)
,
PAN S. W.
(Xiamen Univ., Semiconductor Photonics Res. Centre, Dep. of Physics, 361005, Xiamen, Fujain, People’s Republic of China)
,
CHEN S. Y.
(Xiamen Univ., Semiconductor Photonics Res. Centre, Dep. of Physics, 361005, Xiamen, Fujain, People’s Republic of China)
,
XIE Sheng
(Tianjin Univ., School of Electronic Information Engineer, 300072, Tianjin, People’s Republic of China)
,
LI Cheng
(Xiamen Univ., Semiconductor Photonics Res. Centre, Dep. of Physics, 361005, Xiamen, Fujain, People’s Republic of China)
,
LAI H. K.
(Xiamen Univ., Semiconductor Photonics Res. Centre, Dep. of Physics, 361005, Xiamen, Fujain, People’s Republic of China)
,
SUN H. D.
(Nanyang Technological Univ., Div. of Physics and Applied Physics, School of Physical and Mathematical Sciences ...)
資料名:
Applied Physics. A. Materials Science & Processing
(Applied Physics. A. Materials Science & Processing)
巻:
106
号:
1
ページ:
251-255
発行年:
2012年01月
JST資料番号:
D0256C
ISSN:
0947-8396
CODEN:
APHYCC
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
ドイツ (DEU)
言語:
英語 (EN)