文献
J-GLOBAL ID:201202267688166350
整理番号:12A0833095
専門化した走査トンネル顕微鏡による深いトレンチのミクロ構造の長い範囲の正確な測定
Note: Long range and accurate measurement of deep trench microstructures by a specialized scanning tunneling microscope
著者 (6件):
JU Bing-feng
(The State Key Lab. of Fluid Power Transmission and Control, Zhejiang Univ., Hangzhou 310027, CHN)
,
CHEN Yuan-liu
(The State Key Lab. of Fluid Power Transmission and Control, Zhejiang Univ., Hangzhou 310027, CHN)
,
ZHANG Wei
(The State Key Lab. of Fluid Power Transmission and Control, Zhejiang Univ., Hangzhou 310027, CHN)
,
ZHU Wule
(The State Key Lab. of Fluid Power Transmission and Control, Zhejiang Univ., Hangzhou 310027, CHN)
,
JIN Chao
(The State Key Lab. of Fluid Power Transmission and Control, Zhejiang Univ., Hangzhou 310027, CHN)
,
FANG F. Z.
(The State Key Lab. of Precision Measuring Technol. and Instruments, Centre of MicroNano Manufacturing Technol. ...)
資料名:
Review of Scientific Instruments
(Review of Scientific Instruments)
巻:
83
号:
5
ページ:
056106-056106-3
発行年:
2012年05月
JST資料番号:
D0517A
ISSN:
0034-6748
CODEN:
RSINAK
資料種別:
逐次刊行物 (A)
記事区分:
短報
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)