文献
J-GLOBAL ID:201202271401820842
整理番号:12A1306331
一軸引張下にあるAl-Si-Cu構造薄膜の準静的及び動的機械的性質
Quasistatic and dynamic mechanical properties of Al-Si-Cu structural films in uniaxial tension
著者 (6件):
FUJII Masayuki
(Dep. of Mechanical and Systems Engineering, Univ. of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2201, JPN)
,
NAMAZU Takahiro
(Dep. of Mechanical and Systems Engineering, Univ. of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2201, Japan and Japan ...)
,
FUJII Hiroki
(Dep. of Mechanical and Systems Engineering, Univ. of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2201, JPN)
,
MASUNISHI Kei
(Toshiba Corp., Corporate Res. & Dev. Center, 1 Komukai, Toshiba-cho, Saiwai-ku, Kawasaki-shi, Kanagawa 212-8582, JPN)
,
TOMIZAWA Yasushi
(Toshiba Corp., Corporate Res. & Dev. Center, 1 Komukai, Toshiba-cho, Saiwai-ku, Kawasaki-shi, Kanagawa 212-8582, JPN)
,
INOUE Shozo
(Dep. of Mechanical and Systems Engineering, Univ. of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2201, JPN)
資料名:
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
(Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena)
巻:
30
号:
3
ページ:
031804-031804-9
発行年:
2012年05月
JST資料番号:
E0974A
ISSN:
2166-2746
CODEN:
JVTBD9
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)