文献
J-GLOBAL ID:201302213837156490
整理番号:13A1779033
Ar/CF4大気圧プラズマプロセシング後の溶融石英表面のモルフォロジーと化学的発展
The morphology and chemistry evolution of fused silica surface after Ar/CF4 atmospheric pressure plasma processing
著者 (6件):
JIN Huiliang
(School of Mechanical Engineering, Harbin Inst. of Technol., Harbin 150001, CHN)
,
XIN Qiang
(School of Mechanical Engineering, Harbin Inst. of Technol., Harbin 150001, CHN)
,
LI Na
(School of Mechanical Engineering, Harbin Inst. of Technol., Harbin 150001, CHN)
,
JIN Jiang
(School of Mechanical Engineering, Harbin Inst. of Technol., Harbin 150001, CHN)
,
WANG Bo
(School of Mechanical Engineering, Harbin Inst. of Technol., Harbin 150001, CHN)
,
YAO Yingxue
(School of Mechanical Engineering and Automation, Harbin Inst. of Technol. Shenzhen Graduate School, Shenzhen 518055, CHN)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
286
ページ:
405-411
発行年:
2013年12月01日
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)