文献
J-GLOBAL ID:201302223697768983
整理番号:13A1829567
微小及び高真空領域における圧力測定感度の向上によるMEMS Piraniセンサの最適化
Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and high vacuum regime
著者 (6件):
VOELKLEIN Friedemann
(RheinMain Univ. of Applied Sciences, Inst. for Microtechnologies, Ruesselsheim 65428, DEU)
,
GRAU Mario
(RheinMain Univ. of Applied Sciences, Inst. for Microtechnologies, Ruesselsheim 65428, DEU)
,
MEIER Andreas
(RheinMain Univ. of Applied Sciences, Inst. for Microtechnologies, Ruesselsheim 65428, DEU)
,
HEMER Grit
(RheinMain Univ. of Applied Sciences, Inst. for Microtechnologies, Ruesselsheim 65428, DEU)
,
BREUER Lars
(RheinMain Univ. of Applied Sciences, Inst. for Microtechnologies, Ruesselsheim 65428, DEU)
,
WOIAS Peter
(Dep. of Microsystems Engineering, Univ. of Freiburg, Freiburg 79110, DEU)
資料名:
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films
(Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films)
巻:
31
号:
6
ページ:
061604-061604-12
発行年:
2013年11月
JST資料番号:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)