文献
J-GLOBAL ID:201302254981745821
整理番号:13A0974900
不足膨張超音速ジェットによる非平衡プラズマCVDにおけるケイ素の局所蒸着に及ぼすVHF励起周波数の影響
Effect of VHF excitation frequency on localized deposition of silicon in non-equilibrium-plasma-enhanced CVD by an under-expanded supersonic jet
著者 (10件):
KURIBAYASHI Shizuma
(Dep. of Environmental & Renewable Energy Systems, Graduate School of Engineering, Gifu Univ., 1-1 Yanagido, Gifu ...)
,
TSUNEKAWA Yoshihiro
(Dep. of Environmental & Renewable Energy Systems, Graduate School of Engineering, Gifu Univ., 1-1 Yanagido, Gifu ...)
,
AKAHORI Shoji
(Dep. of Environmental & Renewable Energy Systems, Graduate School of Engineering, Gifu Univ., 1-1 Yanagido, Gifu ...)
,
ANDO Daisuke
(Dep. of Environmental & Renewable Energy Systems, Graduate School of Engineering, Gifu Univ., 1-1 Yanagido, Gifu ...)
,
NAKAMURA Jiro
(Dep. of Environmental & Renewable Energy Systems, Graduate School of Engineering, Gifu Univ., 1-1 Yanagido, Gifu ...)
,
NISHIDA Satoshi
(Dep. of Environmental & Renewable Energy Systems, Graduate School of Engineering, Gifu Univ., 1-1 Yanagido, Gifu ...)
,
MUTA Hiroshi
(Dep. of Environmental & Renewable Energy Systems, Graduate School of Engineering, Gifu Univ., 1-1 Yanagido, Gifu ...)
,
TAKEUCHI Yoshiaki
(Solar Power Dep., Power Systems, Mitsubishi Heavy Industries, Ltd., 6-53 Tukasa-machi, Isahaya 854-0065, JPN)
,
YAMAUCHI Yasuhiro
(Solar Power Dep., Power Systems, Mitsubishi Heavy Industries, Ltd., 6-53 Tukasa-machi, Isahaya 854-0065, JPN)
,
TAKATSUKA Hiromu
(Solar Power Dep., Power Systems, Mitsubishi Heavy Industries, Ltd., 6-53 Tukasa-machi, Isahaya 854-0065, JPN)
資料名:
Surface & Coatings Technology
(Surface & Coatings Technology)
巻:
225
ページ:
75-78
発行年:
2013年06月25日
JST資料番号:
D0205C
ISSN:
0257-8972
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)