文献
J-GLOBAL ID:201302262122751120
整理番号:13A0152579
重力測定センサとしての新しいチェッカーパターンAlN MEMS共振器
A novel checker-patterned AlN MEMS resonator as gravimetric sensor
著者 (8件):
HEIDARI Amir
(Inst. of Microelectronics, A*STAR (Agency for Sci., Technol. and Research), Singapore 117685, SGP)
,
HEIDARI Amir
(Dep. of Mechanical and Aerospace Engineering, Nanyang Technological Univ., Singapore 639798, SGP)
,
YOON Yong-jin
(Dep. of Mechanical and Aerospace Engineering, Nanyang Technological Univ., Singapore 639798, SGP)
,
LEE Man I
(Inst. of Microelectronics, A*STAR (Agency for Sci., Technol. and Research), Singapore 117685, SGP)
,
KHINE Lynn
(Inst. of Microelectronics, A*STAR (Agency for Sci., Technol. and Research), Singapore 117685, SGP)
,
PARK Mi Kyoung
(Inst. of Microelectronics, A*STAR (Agency for Sci., Technol. and Research), Singapore 117685, SGP)
,
TSAI Julius Ming Lin
(Inst. of Microelectronics, A*STAR (Agency for Sci., Technol. and Research), Singapore 117685, SGP)
,
TSAI Julius Ming Lin
(Dep. of Electrical and Computer Engineering, National Univ. of Singapore, Singapore 117576, SGP)
資料名:
Sensors and Actuators. A. Physical
(Sensors and Actuators. A. Physical)
巻:
189
ページ:
298-306
発行年:
2013年01月15日
JST資料番号:
B0345C
ISSN:
0924-4247
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)