文献
J-GLOBAL ID:201302272123396582
整理番号:13A1156570
マルチ中空放電プラズマCVDを用いて堆積させたマイクロ結晶質膜の性質へのナノ粒子導入による影響
Effects of nanoparticle incorporation on properties of microcrystalline films deposited using multi-hollow discharge plasma CVD
著者 (9件):
KIM Yeonwon
(Graduate School of Information Sci. and Electrical Engineering, Kyushu Univ., Fukuoka 819-0395, JPN)
,
MATSUNAGA Takeaki
(Graduate School of Information Sci. and Electrical Engineering, Kyushu Univ., Fukuoka 819-0395, JPN)
,
NAKAHARA Kenta
(Graduate School of Information Sci. and Electrical Engineering, Kyushu Univ., Fukuoka 819-0395, JPN)
,
SEO Hyunwoong
(Center of Plasma Nano-interface Engineering, Kyushu Univ., Fukuoka 819-0395, JPN)
,
KAMATAKI Kunihiro
(Center for Res. and Advancement in Higher Education, Kyushu Univ., Fukuoka 819-0395, JPN)
,
UCHIDA Giichiro
(Graduate School of Information Sci. and Electrical Engineering, Kyushu Univ., Fukuoka 819-0395, JPN)
,
ITAGAKI Naho
(Graduate School of Information Sci. and Electrical Engineering, Kyushu Univ., Fukuoka 819-0395, JPN)
,
KOGA Kazunori
(Graduate School of Information Sci. and Electrical Engineering, Kyushu Univ., Fukuoka 819-0395, JPN)
,
SHIRATANI Masaharu
(Graduate School of Information Sci. and Electrical Engineering, Kyushu Univ., Fukuoka 819-0395, JPN)
資料名:
Surface & Coatings Technology
(Surface & Coatings Technology)
巻:
228
号:
Supplement 1
ページ:
S550-S553
発行年:
2013年08月15日
JST資料番号:
D0205C
ISSN:
0257-8972
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)