文献
J-GLOBAL ID:201302282750789218
整理番号:13A0146847
TiN膜の微細構造及び表面特性に及ぼすパルスバイアスデューティ比の効果
Effects of pulsed bias duty ratio on microstructure and surface properties of TiN films
著者 (11件):
YONGQIANG Wei
(School of Mechatronics Engineering, Zhengzhou Inst. of Aeronautical Ind. Management, No. 2, Daxue Middle Street ...)
,
YONGQIANG Wei
(State Key Lab. of Advanced Welding and Joining, Harbin Inst. of Technol., Harbin 150001, CHN)
,
YONGQIANG Wei
(Engineering Technol. Res. Center of Aviation Manufacturing & Equipment, Univ. of Henan Province, Zhengzhou 450015, CHN)
,
XIAOXIA Chen
(School of Mechatronics Engineering, Zhengzhou Inst. of Aeronautical Ind. Management, No. 2, Daxue Middle Street ...)
,
XIUBO Tian
(State Key Lab. of Advanced Welding and Joining, Harbin Inst. of Technol., Harbin 150001, CHN)
,
CHUNZHI Gong
(State Key Lab. of Advanced Welding and Joining, Harbin Inst. of Technol., Harbin 150001, CHN)
,
SHIQIN Yang
(State Key Lab. of Advanced Welding and Joining, Harbin Inst. of Technol., Harbin 150001, CHN)
,
ZHIQIANG Jiang
(School of Mechatronics Engineering, Zhengzhou Inst. of Aeronautical Ind. Management, No. 2, Daxue Middle Street ...)
,
ZHIQIANG Jiang
(Engineering Technol. Res. Center of Aviation Manufacturing & Equipment, Univ. of Henan Province, Zhengzhou 450015, CHN)
,
LIANGJI Chen
(School of Mechatronics Engineering, Zhengzhou Inst. of Aeronautical Ind. Management, No. 2, Daxue Middle Street ...)
,
LIANGJI Chen
(Engineering Technol. Res. Center of Aviation Manufacturing & Equipment, Univ. of Henan Province, Zhengzhou 450015, CHN)
資料名:
Vacuum
(Vacuum)
巻:
89
ページ:
185-189
発行年:
2013年03月
JST資料番号:
E0347A
ISSN:
0042-207X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)